Standard
[CURRENT]
2017-04
DIN EN 62047-25:2017-04
Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area (IEC 62047-25:2016); German version EN 62047-25:2016
The main structural materials for MEMS, microcomponents and so on have special properties such as dimensions in the micrometer range, material manufacturing processes using layer deposition and ...