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Standard [WITHDRAWN]

DIN 50450-9:2003-04

Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C₁-C₃-hydrocarbons in gaseous hydrogen chloride by gaschromatography

German title
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Verunreinigungen in Träger - und Dotiergasen - Teil 9: Bestimmung von Sauerstoff, Stickstoff, Kohlenstoffmonooxid, Kohlenstoffdioxid, Wasserstoff und C₁-C₃-Kohlenwasserstoffen in Chlorwasserstoff mit Gaschromatographie
Publication date
2003-04
Original language
German
Pages
5

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Publication date
2003-04
Original language
German
Pages
5
DOI
https://dx.doi.org/10.31030/9451435

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ICS
29.045, 71.100.20
DOI
https://dx.doi.org/10.31030/9451435
Replacement amendments

This document has been replaced by: DIN 50450-9:2021-07 .

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