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Standard [CURRENT]

DIN 50450-9:2021-07

Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C₁-C₃-hydrocarbons in gaseous hydrogen chloride by gaschromatography

German title
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Verunreinigungen in Träger- und Dotiergasen - Teil 9: Bestimmung von Sauerstoff, Stickstoff, Kohlenstoffmonooxid, Kohlenstoffdioxid, Wasserstoff und C₁-C₃-Kohlenwasserstoffen in Chlorwasserstoff mit Gaschromatographie
Publication date
2021-07
Original language
German
Pages
8

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Publication date
2021-07
Original language
German
Pages
8
DOI
https://dx.doi.org/10.31030/3261270

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Content
ICS
29.045, 71.100.20
DOI
https://dx.doi.org/10.31030/3261270
Replacement amendments

This document replaces DIN 50450-9:2003-04 .

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