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Technical rule [CURRENT]

VDI/VDE 2655 Blatt 1.3:2020-02

Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement

German title
Optische Messtechnik an Mikrotopografien - Kalibrieren von flächenhaft messenden Interferometern und Interferenzmikroskopen für die Formmessung
Publication date
2020-02
Original language
German, English
Pages
50

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Publication date
2020-02
Original language
German, English
Pages
50

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Short description
This standard characterises interference microscopes with their measuring technology properties for measuring the surfaces of form elements. This includes the feedback and the calculation of the measurement uncertainty when measuring shape parameters. In addition to the interference microscopes described in VDI 2655 Part 1.1, the methods described here can also be applied to interferometers whose measuring fields can have dimensions of up to approx. Ø 20 mm.
Content
ICS
17.180.01
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