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Technical rule [NEW]

VDI 2083 Blatt 7:2025-01

Cleanroom technology - Ultrapure media - Quality, supply, distribution

German title
Reinraumtechnik - Reinstmedien - Qualität, Bereitstellung, Verteilung
Publication date
2025-01
Original language
German, English
Pages
77

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Publication date
2025-01
Original language
German, English
Pages
77

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Short description
The standard deals with the specification of ultrapure media (steam, gases, chemicals) for contamination-controlled processes and with the distribution systems for such media. The standard provides a summary of knowledge regarding the design, construction, operation and monitoring of high purity supply systems, and supports planners, system suppliers and operators in their work.
Content
ICS
13.040.35
Replacement amendments

This document replaces VDI 2083 Blatt 7:2015-10 .

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