Cleanroom technology - Compatibility of materials with the required cleanliness
German title
Reinraumtechnik - Reinheitstauglichkeit von Werkstoffen
Publication date
2013-06
Original language
German,
English
Pages
71
Publication date
2013-06
Original language
German,
English
Pages
71
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Short description
The guideline deals with particulate and chemical (molecular) contaminations and electrostatic characteristics of materials and the cleanability of surfaces. Biological and radiological contaminations are not a specific subject of this guideline. The guideline defines the cleanliness compatibility and cleanroom compatiblity for materials. Based on this, a classification is made, and procedures are specified for determining the suitability for the intended use in clean production areas.