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Technical rule [CURRENT]

ISO/TR 16268:2009-10

Surface chemical analysis - Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation

German title
Chemische Oberflächenanalyse - Vorschlag für ein Verfahren für die Zertifizierung der zurückbehaltenen Partikel-Fluenz eines durch Ionenimplantation hergestellten Arbeits-Referenzmaterials
Publication date
2009-10
Original language
English
Pages
19

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Publication date
2009-10
Original language
English
Pages
19

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Content
ICS
71.040.30, 71.040.40

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