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Standard [CURRENT]

ISO 25178-603:2013-10

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

German title
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 603: Merkmale von berührungslos messenden Geräten (phasenschiebende interferometrische Mikroskopie)
Publication date
2013-10
Original language
English
Pages
28

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Publication date
2013-10
Original language
English
Pages
28

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Content
ICS
17.040.40

Cooperation at DIN

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