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Standard [CURRENT]

ISO 22415:2019-05

Surface chemical analysis - Secondary ion mass spectrometry - Method for determining yield volume in argon cluster sputter depth profiling of organic materials

German title
Chemische Oberflächenanalyse - Sekundärionen-Massenspektrometrie - Verfahren zur Bestimmung der Volumenausbeute bei der Tiefenprofilierung von organischen Materialien mit Argon-Cluster-Sputtern
Publication date
2019-05
Original language
English
Pages
30

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Publication date
2019-05
Original language
English
Pages
30

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Content
ICS
71.040.40

Cooperation at DIN

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