Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 5: Non-evaporable getter (NEG) vacuum pumps
German title
Vakuumtechnik - Standardverfahren zur Messung der Leistung von Vakuumpumpen - Teil 5: NEG-Vakuumpumpen
Publication date
2023-11
Original language
English
Pages
27
Publication date
2023-11
Original language
English
Pages
27
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Content
ICS
23.160
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