DIN ISO 15632:2015-11

This International Standard defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This International Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This International Standard specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309 and ASTM E15108. The responsible German committee for this standard is Working Committee NA 062-08-18 AA "Elektronenmikroskopie und Mikrobereichsanalyse" ("Electron microscopy and microbeam analysis") at DIN Standards Committee Materials Testing (NMP).