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DIN EN ISO 14644-10:2013-06

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013); German version EN ISO 14644-10:2013

German title
Reinräume und zugehörige Reinraumbereiche - Teil 10: Klassifizierung der chemischen Oberflächenreinheit (ISO 14644-10:2013); Deutsche Fassung EN ISO 14644-10:2013
Publication date
2013-06
Original language
German
Pages
40

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Publication date
2013-06
Original language
German
Pages
40
DOI
https://dx.doi.org/10.31030/1926220

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Overview

This document (FprEN ISO 14644-10:2012) has been prepared by Technical Committee ISO/TC 209 "Cleanrooms and associated controlled environments" in collaboration with the Technical Committee CEN/TC 243 "Cleanroom technology", the secretariat of which is held by BSI (United Kingdom). The committee responsible for the German version is Working Committee NA 041-02-21 AA "Reinraumtechnik (SpA CEN/TC 243 und ISO/TC 209)" ("Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)") of the Standards Committee for Heating and Ventilation (NHRS) at DIN the German Institute for Standardization e. V. The series DIN EN ISO 14644 "Cleanrooms and associated controlled environments" consists of the following parts: Part 1: Classification of air cleanliness by particle concentration Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1 Part 3: Test methods Part 4: Design, construction and start-up Part 5: Operations Part 6: Vocabulary Part 7: Separative devices (clean air hoods, glove boxes, isolators and mini-environments) Part 8: Classification of air cleanliness by chemical concentration (ACC) Part 9: Classification of surface cleanliness by particle concentration Part 10: Classification of surface cleanliness by chemical concentration This part of the ISO 14644 series specifies the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This part of the ISO 14644 series is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Content
ICS
13.040.35
DOI
https://dx.doi.org/10.31030/1926220
Replacement amendments

This document has been replaced by: DIN EN ISO 14644-10:2022-10 .

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