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Standard [PRE-ORDER]

DIN 32567-3:2025-05

Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices

German title
Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 3: Ableitung von Korrekturwerten für taktile Messgeräte
Publication date
2025-05
Original language
German
Pages
31

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Publication date
2025-05
Original language
German
Pages
31
DOI
https://dx.doi.org/10.31030/3597483

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Content
ICS
39.020
DOI
https://dx.doi.org/10.31030/3597483
Replacement amendments

This document replaces DIN 32567-3:2014-10 .

Cooperation at DIN

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