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Draft standard

DIN 32567-3:2024-11 - Draft

Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices

German title
Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 3: Ableitung von Korrekturwerten für taktile Messgeräte
Date of issue
2024-10-18
Publication date
2024-11
Original language
German
Pages
32

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Date of issue
2024-10-18
Publication date
2024-11
Original language
German
Pages
32
DOI
https://dx.doi.org/10.31030/3575070

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Content
ICS
39.020
DOI
https://dx.doi.org/10.31030/3575070

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