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Technical rule [CURRENT]

VDI 2083 Blatt 8.1:2014-10

Cleanroom technology - Air cleanliness chemical concentration (ACC)

German title
Reinraumtechnik - Luftreinheit anhand chemischer Konzentration (ACC)
Publication date
2014-10
Original language
German, English
Pages
56

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Publication date
2014-10
Original language
German, English
Pages
56

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Short description
This standard deals with the chemical contamination of clean environments. It describes the phenomenon as such, metrology and control of air contamination by gaseous chemicals. This standard has been harmonised with the standard DIN EN ISO 14644-8; the latter, however does not addres the subjects of metrology or control of airborne chemical contamination (formerly termed AMC).
Content
ICS
13.040.35
Replacement amendments

This document replaces VDI 2083 Blatt 8.1:2009-07 .

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