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Technical rule [WITHDRAWN]

VDI 2083 Blatt 7:2000-01

Cleanroom technology - Cleanliness of process media

German title
Reinraumtechnik - Reinheit von Prozeßmedien
Publication date
2000-01
Original language
German, English
Pages
22

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Publication date
2000-01
Original language
German, English
Pages
22

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Short description
The document contains a classification of the cleanliness of process media. Beyond the cleanliness of liquid and gaseous media, this classification can basically also be applied to complete systems, i.e. including particles released by installations. For the purpose of qualifying particulate cleanliness, the Guideline describes standardised measurement procedures and provides indications for assuring the required cleanliness conditions. The application of these measurement techniques is carried out by means of inspecting installations for process media supply, see also parts 8 and 10 of this Guideline, as well as for the qualification of commercial products. In respect to ensuring particulate cleanliness of process media at the point of use, aspects of microfiltration are condidered.
Content
ICS
13.040.35
Replacement amendments

This document has been replaced by: VDI 2083 Blatt 7:2006-11 .

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