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Technical rule [WITHDRAWN]

VDI 2083 Blatt 4:1996-02

Cleanroom technology - Surface cleanliness

German title
Reinraumtechnik - Oberflächenreinheit
Publication date
1996-02
Original language
German, English
Pages
51

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Publication date
1996-02
Original language
German, English
Pages
51

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Short description
The document is intended as an aid for the planning, generation, maintenance, restoration and evaluation of the required cleanliness on surfaces in cleanrooms. It includes the classification of the surface cleanliness, the requirements on the cleanliness and suitability of surfaces; the procedures for the cleaning and decontamination of surfaces; the test methods for the evaluation of the surface cleanliness.
Content
ICS
13.040.35
Replacement amendments

This document has been replaced by: VDI 2083 Blatt 5.1:2007-09 , VDI 2083 Blatt 9.1:2006-12 .

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