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Technical rule [WITHDRAWN]

VDI 2083 Blatt 3:2005-07

Cleanroom technology - Metrology and test methods

German title
Reinraumtechnik - Messtechnik in der Reinraumluft
Publication date
2005-07
Original language
German, English
Pages
40

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Publication date
2005-07
Original language
German, English
Pages
40

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Short description
This guideline specifies measurement procedures for cleanrooms, which are applied during handing over, in the context of the qualification of new installations, for routine checks and for continuous monitoring. The methods described here are tailored to the needs of cleanrooms, thus being different from measurement procedures for other technical systems.
Content
Show contents (de,en)
ICS
13.040.35
Replacement amendments

This document replaces VDI 2083 Blatt 3:1983-02 .

This document has been replaced by: VDI 2083 Blatt 3:2022-08 .

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