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Technical rule [WITHDRAWN]

VDI 2083 Blatt 10:1998-02

Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems

German title
Reinraumtechnik - Reinstmedien-Versorgungssysteme
Publication date
1998-02
Original language
German, English
Pages
26

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Publication date
1998-02
Original language
German, English
Pages
26

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Short description
High-Purity/Ultra-High-Purity (HP-/UHP-) media (chemicals and gases) are being used more and more for many production purposes. The aim is to maintain the level of cleanliness between the point of supply (P.O.S.) and the point of entry (P.O.E.) or, respectively, to accept a reduction in purity only in certain defined areas where it is permissible. The purpose of this Guideline is to summarize knowledge regarding the design, construction, operation and monitoring of HP-/UHP-media supply systems. Cleanliness refers to residual contaminants such as particles, cations, anions, TOC and other specific parameters (foreign gases, humidity etc.). There is no information provided concerning cleanliness requirement conditions as these shall be determined by the respective user according to the intended utilization.
Content
ICS
13.040.35
Replacement amendments

This document has been replaced by: VDI 2083 Blatt 7:2015-10 .

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