Cleanroom technology - Fundamentals, definitions, specification of cleanliness classes
German title
Reinraumtechnik - Grundlagen, Definitionen und Festlegungen der Reinheitsklassen
Publication date
1995-04
Original language
German,
English
Pages
9
Publication date
1995-04
Original language
German,
English
Pages
9
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Short description
The guideline specifies permissible airborne particulate concentrations at a clean work place based on air cleanliness classes. For the purpose of specification and/or contractual agreements, air cleanliness classes may be aplied in order to evaluate the "state of rest" and the "state of operation" of cleanrooms.