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Technical rule [CURRENT]

VDI 2083 Blatt 1.1:2021-01

Cleanroom technology - Particulate air cleanliness classes for nano-scaled particles (ACnP)

German title
Reinraumtechnik - Partikelreinheitsklassen der Luft anhand nanopartikulärer Konzentration (ACnP)
Publication date
2021-01
Original language
German, English
Pages
12

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Publication date
2021-01
Original language
German, English
Pages
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Short description
This standard describes the measurement and classification of air cleanliness in regard to nanoparticles with dimensions from 5 nm up to < 100 nm regardless of their origin. According to this standard, primarily not a complete clean room is classified with regard to the airborne concentration of nanoscale particles, but local concentration ratios at specifically defined points.
Content
ICS
13.040.35
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