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Technical rule [WITHDRAWN]

PAS 1022:2004-02

Reference procedure for the determination of optical and dielectric material properties and the layer thickness of thin films by ellipsometry

German title
Referenzverfahren zur Bestimmung von optischen und dielektrischen Materialeigenschaften sowie der Schichtdicke dünner Schichten mittels Ellipsometrie
Publication date
2004-02
Original language
German, English
Pages
17
Procedure
PAS
Note
The issuing body recommends using {0} DIN 50989-1:2018-03 .

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Publication date
2004-02
Original language
German, English
Pages
17
Procedure
PAS
Note
The issuing body recommends using {0} DIN 50989-1:2018-03 .

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