Semiconductor devices - Micro-electromechanical devices - Part 21: test method for Poisson's ratio of thin film MEMS materials
German title
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 21: Prüfverfahren zur Querkontraktionszahl von Dünnschictwerkstoffen der Milkrosystemtechnik
Publication date
2014-12-26
Original language
French
Pages
18
Publication date
2014-12-26
Original language
French
Pages
18
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