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Standard [CURRENT]

ISO 23170:2022-06

Surface chemical analysis - Depth profiling - Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering

German title
Chemische Oberflächenanalyse - Tiefenprofilierung - Zerstörungsfreie Tiefenprofilierung nanoskaliger Schwermetalloxid-Dünnschichten auf Si-Substraten mit mittelenergetischer Ionenstreuung
Publication date
2022-06
Original language
English
Pages
29

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Publication date
2022-06
Original language
English
Pages
29

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Content
ICS
71.040.40

Cooperation at DIN

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