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Content
Content (en)
Foreword
Introduction
Scope
Normative references
Terms and definitions
Symbols
Particle deposition rate methodology
General
Establishing the particle deposition rate required for control of particle deposition on vulnerable surfaces
Particle deposition rate for demonstrating control of particle contamination
Measurement of particle deposition rate
Particle deposition rate level
Documentation
Measurement of particle deposition rate (informative)
General
Particle size
Particle deposition rate measurements
Measuring efficiency
Particle deposition measurement instruments and witness plates
Required measurement time of particle deposition rate
Examples of particle deposition rate measurements (informative)
Example of particle deposition rate measurements at a critical location
Examples of monitoring the particle deposition rate at a critical location
Measurement of the particle obscuration (informative)
General
Measurement of particle obscuration
Relationship between particle deposition rate and airborne concentration of particles (informative)
Assessment and control of particle deposition (informative)
General
Example of a calculation of the risk from particle deposition onto a vulnerable surface
Example of calculation of the particle deposition rate required for an acceptable amount of particle contamination of surfaces
Reduction of the risk of surface contamination from depositing particles
Reduction of risk of surface contamination by improving cleanroom procedures
Example of designing and upgrading the ventilation to achieve the correct particle deposition rate level
Monitoring of the particle deposition rate
Bibliography
ICS
13.040.35
Cooperation at DIN
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