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Standard [CURRENT]

ISO 14644-13:2017-06

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications

German title
Reinräume und zugehörige Reinraumbereiche - Teil 13: Reinigung von Oberflächen zur Erreichung definierter Reinheitsgrade hinsichtlich Partikel- und Chemikalienklassifikationen
Publication date
2017-06
Original language
English
Pages
34

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Publication date
2017-06
Original language
English
Pages
34

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Content
ICS
13.040.35

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