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Standard [CURRENT]

ISO 14644-12:2018-08

Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

German title
Reinräume und zugehörige Reinraumbereiche - Teil 12: Spezifikationen für die Überwachung der Luftreinheit anhand der Nanopartikelkonzentration
Publication date
2018-08
Original language
English
Pages
11

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Publication date
2018-08
Original language
English
Pages
11

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Content
ICS
13.040.35

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