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IEC 62047-5:2011-07

Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches

German title
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 5: Hochfrequenz-MEMS-Schalter
Publication date
2011-07
Original language
English, French
Pages
69
Publication date
2011-07
Original language
English, French
Pages
69

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Replacement amendments

This document has been modified by: IEC 62047-5 Corrigendum 1:2012-03

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