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IEC 62047-5:2011-07
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
- German title
- Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 5: Hochfrequenz-MEMS-Schalter
- Publication date
-
2011-07
- Original language
-
English,
French
- Pages
- 69
- Publication date
-
2011-07
- Original language
-
English,
French
- Pages
- 69
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Replacement amendments
This document has been modified by: IEC 62047-5 Corrigendum 1:2012-03
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