Standard
[CURRENT]
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IEC 62047-4:2008-08
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specifications for MEMS
- German title
- Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 4: Fachgrundspezifikation für Mikrosystemtechnik
- Publication date
-
2008-08
- Original language
-
English,
French
- Pages
- 38
- Publication date
-
2008-08
- Original language
-
English,
French
- Pages
- 38
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