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IEC 62047-3:2006-08

Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing

German title
Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 3: Dünnschicht-Standardmikroprobe für die Prüfung der Zugbeanspruchung
Publication date
2006-08
Original language
English, French
Pages
15
Publication date
2006-08
Original language
English, French
Pages
15

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