Standard
[CURRENT]
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IEC 62047-3:2006-08
Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing
- German title
- Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 3: Dünnschicht-Standardmikroprobe für die Prüfung der Zugbeanspruchung
- Publication date
-
2006-08
- Original language
-
English,
French
- Pages
- 15
- Publication date
-
2006-08
- Original language
-
English,
French
- Pages
- 15
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