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Standard [CURRENT]

DIN ISO 18516:2020-11

Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English

German title
Chemische Oberflächenanalyse - Augerelektronen-Spektroskopie und Röntgenphotoelektronen-Spektroskopie - Bestimmung der lateralen Auflösung (ISO 18516:2019); Text Englisch
Publication date
2020-11
Original language
English
Pages
63

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Publication date
2020-11
Original language
English
Pages
63
DOI
https://dx.doi.org/10.31030/3173554

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Content
ICS
71.040.40
DOI
https://dx.doi.org/10.31030/3173554

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