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This part of ISO 25178 is a geometrical product specification (GPS) standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of standards on areal surface texture. The ISO/GPS Masterplan given in ISO/TR 14638 gives an overview of the ISO/GPS system of which this part of ISO 25178 is a part of. The fundamental rules of ISO/GPS given in ISO 8015 apply to this part of ISO 25178 and the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this part of ISO 25178, unless otherwise indicated. This part of ISO 25178 describes the metrological characteristics of focus variation microscopes designed for the measurement of surface topography maps. This document (EN ISO 25178-606:2015) has been prepared by Technical Committee ISO/TC 213 "Dimensional and geometrical product specifications and verification" (secretariat: DS, Denmark) in collaboration with Technical Committee CEN/TC 290 "Dimensional and geometrical product specification and verification", the secretariat of which is held by AFNOR (France). The responsible national committee is Working Committee NA 152-03-03 AA "Oberflächen" ("Surfaces") at DIN Standards Committee Technical Fundamentals (NATG).