Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021); German version EN ISO 23216:2022
German title
Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen Kohlenstoffschichten mittels spektroskopischer Ellipsometrie (ISO 23216:2021); Deutsche Fassung EN ISO 23216:2022
Publication date
2023-01
Original language
German
Pages
14
Publication date
2023-01
Original language
German
Pages
14
DOI
https://dx.doi.org/10.31030/3395067
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Content
ICS
25.220.99
DOI
https://dx.doi.org/10.31030/3395067
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