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Standard [CURRENT]

DIN EN ISO 23131:2023-01

Ellipsometry - Principles (ISO 23131:2021); German version EN ISO 23131:2022

German title
Ellipsometrie - Grundlagen (ISO 23131:2021); Deutsche Fassung EN ISO 23131:2022
Publication date
2023-01
Original language
German
Pages
24

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Publication date
2023-01
Original language
German
Pages
24
DOI
https://dx.doi.org/10.31030/3395066

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Content
ICS
17.020
DOI
https://dx.doi.org/10.31030/3395066
Replacement amendments

This document replaces DIN 50989-1:2018-03 .

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