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Standard [CURRENT]

DIN EN ISO 14644-9:2022-10

Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022); German version EN ISO 14644-9:2022

German title
Reinräume und zugehörige Reinraumbereiche - Teil 9: Bewertung der partikulären Oberflächenreinheit (ISO 14644-9:2022); Deutsche Fassung EN ISO 14644-9:2022
Publication date
2022-10
Original language
German
Pages
39

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Publication date
2022-10
Original language
German
Pages
39
DOI
https://dx.doi.org/10.31030/3365426

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Content
ICS
13.040.35
DOI
https://dx.doi.org/10.31030/3365426
Replacement amendments

This document replaces DIN EN ISO 14644-9:2012-12 .

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