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Standard [CURRENT]

DIN EN ISO 14644-15:2018-03

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017); German version EN ISO 14644-15:2017

German title
Reinräume und zugehörige Reinraumbereiche - Teil 15: Bewertung der Reinraumtauglichkeit von Ausrüstungsgegenständen und Materialien anhand der chemischen Luft- und Oberflächenkonzentration (ISO 14644-15:2017); Deutsche Fassung EN ISO 14644-15:2017
Publication date
2018-03
Original language
German
Pages
32

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Publication date
2018-03
Original language
German
Pages
32
DOI
https://dx.doi.org/10.31030/2705331

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Content
ICS
13.040.35
DOI
https://dx.doi.org/10.31030/2705331

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