Standard [CURRENT]
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This standard links the cleanroom classification of air cleanliness by particle concentration to the suitability of equipment for use in cleanrooms and associated controlled environments. This standard specifies a methodology to assess the suitability of equipment (for example, machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 μm to equal to or larger than 5 μm (given in ISO 14644-1).