Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017); German version EN ISO 14644-13:2017
German title
Reinräume und zugehörige Reinraumbereiche - Teil 13: Reinigung von Oberflächen zur Erreichung definierter Reinheitsgrade hinsichtlich Partikel- und Chemikalienklassifikationen (ISO 14644-13:2017); Deutsche Fassung EN ISO 14644-13:2017
Publication date
2017-11
Original language
German
Pages
44
Publication date
2017-11
Original language
German
Pages
44
DOI
https://dx.doi.org/10.31030/2641432
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Content
ICS
13.040.35
DOI
https://dx.doi.org/10.31030/2641432
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