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Standard [CURRENT]

DIN EN 62047-3:2007-02

Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile-testing (IEC 62047-3:2006); German version EN 62047-3:2006

German title
Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 3: Dünnschicht-Standardmikroprobe für die Prüfung der Zugbeanspruchung (IEC 62047-3:2006); Deutsche Fassung EN 62047-3:2006
Publication date
2007-02
Original language
German
Pages
9

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Publication date
2007-02
Original language
German
Pages
9
DOI
https://dx.doi.org/10.31030/9782033

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ICS
31.080.01, 31.220.01
DOI
https://dx.doi.org/10.31030/9782033

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