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Standard [CURRENT]

DIN 50450-4:1993-09

Testing of materials for semiconductor technology; determination of impurities in carrier gases and dopant gases; determination of C₁-C₃-hydrocarbons in nitrogen by gas-chromatography

German title
Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Verunreinigungen in Träger- und Dotiergasen; Bestimmung von C₁-C₃-Kohlenwasserstoffen in Stickstoff mit Gaschromatographie
Publication date
1993-09
Original language
German
Pages
2

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Publication date
1993-09
Original language
German
Pages
2
DOI
https://dx.doi.org/10.31030/2590347

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ICS
29.045, 71.100.20
DOI
https://dx.doi.org/10.31030/2590347

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