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Standard [CURRENT]

DIN 32564-1:2004-05

Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology

German title
Fertigungsmittel für Mikrosysteme - Begriffe - Teil 1: Allgemeine Begriffe der Mikrosystemtechnik
Publication date
2004-05
Original language
German
Pages
6

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Publication date
2004-05
Original language
German
Pages
6
DOI
https://dx.doi.org/10.31030/9547787

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ICS
01.040.39, 39.020
DOI
https://dx.doi.org/10.31030/9547787

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