Surface chemical analysis. Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
German title
Chemische Analytik an Oberflächen. Chemische Methoden für die Sammlung von Elementen von der Oberfläche von Siliziumscheiben-Arbeits-Referenzmaterialien und deren Bestimmung mit Totalreflexions-Röntgenfluoreszenzanalyse (TXRF)
Publication date
2005-03-31
Original language
English
Pages
28
Publication date
2005-03-31
Original language
English
Pages
28
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