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This part of IEC 61994 specifies the terms and definitions for single crystal wafers applied for surface acoustic wave (SAW) devices representing the state of the art. The glossary explains terms relating to: - quartz crystals, such as as-grown synthetic quartz crystals or congruent composition, - single crystal materials, such as lanthanum gallium silicate or lithium tetraborate, - assessment of the wafers, such as back surface roughness, bevel or chip, - quality assessment, such as acceptable quality level or local thickness variation, - surface acoustic wave (SAW) devices, such as SAW propagation or tolerance of surface orientation. These terms are intended for use in the standards and documents of Technical Committee IEC/TC 49. The responsible committee is K 642 "Piezoelektrische Bauteile zur Frequenzstabilisierung und -selektion" ("Piezoelectric and dielectric devices for frequency control and selection") of the DKE (German Commission for Electrical, Electronic and Information Technologies) at DIN and VDE.