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Standard [CURRENT]

UNE-EN 62047-21:2014-11-01

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)

Publication date
2014-11-01
Original language
English
Pages
13

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Publication date
2014-11-01
Original language
English
Pages
13

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