Standard
[CURRENT]
SN EN 62047-26:2016-04
Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures
- German title
- Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 26: Beschreibung und Messverfahren für Mikro-Rillen und Nadelstrukturen
- Publication date
-
2016-04
- Original language
-
German
- Pages
- 27
- Publication date
-
2016-04
- Original language
-
German
- Pages
- 27
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