Standard
[CURRENT]
SN EN 62047-15:2015-07
Semiconductor devices - Micro-electromechanical devices - Part 15: Test method of bonding strength between PDMS and glass
- German title
- Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 15: Prüfverfahren zur Bondqualität zwischen PDMS und Glas
- Publication date
-
2015-07
- Original language
-
German
- Pages
- 11
- Publication date
-
2015-07
- Original language
-
German
- Pages
- 11
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