Coating, Vapor Deposited Poly-Monochloro-Para-Xylylene for Microcircuits
Publication date
2015-10-22
Original language
English
Pages
12
Publication date
2015-10-22
Original language
English
Pages
12
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Short description
This specification covers requirements for poly-monochloro-para-xylylene coatings. Primarily for use as a secondary moisture barrier coating on hybrid microcircuit substrates and on active monolithic devices. Additionally, the coating immobilizes undesirable particles remaining in sealed microcircuits and enhances to some degree the strength of fine wire interconnections.