Standard
[CURRENT]
OEVE/OENORM EN 62047-5:2012-05-01
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches (IEC 62047-5:2011) (german version)
- German title
- Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 5: Hochfrequenz-MEMS-Schalter (IEC 62047-5:2011) (deutsche Fassung)
- Publication date
-
2012-05-01
- Original language
-
German
- Pages
- 37
- Publication date
-
2012-05-01
- Original language
-
German
- Pages
- 37
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