Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)
German title
Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen Kohlenstoffschichten mittels spektrokopischer Ellipsometrie (ISO 23216:2021)
Publication date
2023-02-15
Original language
German
Pages
14
Publication date
2023-02-15
Original language
German
Pages
14
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