Standard
[CURRENT]
NF C96-050-6:2010-09-01
NF EN 62047-6:2010-09-01
Semiconductor devices - Micro-electromechanical devices - Part 6: axial fatigue testing methods of thin film materials
- German title
- Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 6: Prüfverfahren zur uniaxialen Dauerschwingfestigkeit von Dünnschicht-Werkstoffen
- Publication date
-
2010-09-01
- Original language
-
French
- Pages
- 19
- Publication date
-
2010-09-01
- Original language
-
French
- Pages
- 19
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